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zamberdine resists [1 article]

最近 zamberdine さんのライブラリに追加された論文の中から タグ resists. You can also see everyone's resists.
  • High-RI resist polymers for 193 nm immersion lithography
    Advances in Resist Technology and Processing XXII, Vol. 5753, No. 1. (2005), pp. 827-835.
    by Andrew K Whittaker, Idriss Blakey, Heping Liu, David JT Hill, Graeme A George, Will Conley, Paul Zimmerman
    edited by John L Sturtevant
    posted to high qspr resists ri by zamberdine on 2007-09-24 14:11:17 as ***** along with 1 person kewms
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