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thomaswaechtler capacitor [1 article]

最近 thomaswaechtler さんのライブラリに追加された論文の中から タグ capacitor. You can also see everyone's capacitor.
  • Conformal CVD-ruthenium process for MIM capacitor in giga-bit DRAMs
    Electron Devices Meeting, 2000. IEDM Technical Digest. International (2000), pp. 789-792.
    by Seok-Jun Won, Wan-Don Kim, Cha-Young Yoo, Sung-Tae Kim, Young-Wook Park, Joo-Tae Moon, Moon-Yong Lee
    posted to capacitor cvd dram memory mim ruthenium by thomaswaechtler on 2007-05-23 12:31:44 as **
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