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aes alcohol ald ammonia annealing atomic avd bond caltech capacitor cell chemistry cmp coordination copper cu2o cupraselect cvd deposition dram electroplating ellipsometry ethanol heat hfac hydrogen layer lead material materials memory mems mim nanobelts nanowires nitride oxidation oxide oxygen pbte plasma power precursor precursors pvd reduction review ruthenium seed simulation sink solar spectroscopic tantalum tdmat telluride thallium thermoelectric thermoelectrics titanium tl tmvs uv vacuum xaes xps zinc zno

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