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Self-assembled single-crystal silicon circuits on plastic

by: Sean A Stauth, Babak A Parviz
PNAS, Vol. 103, No. 38. (19 September 2006), pp. 13922-13927.


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Functional, self-assembled circuits on a flexible plastic substrate

tengli (公開 ) - 2006-11-16 19:53:00

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We demonstrate the use of self-assembly for the integration of freestanding micrometer-scale components, including single-crystal, silicon field-effect transistors (FETs) and diffusion resistors, onto flexible plastic substrates. Preferential self-assembly of multiple microcomponent types onto a common platform is achieved through complementary shape recognition and aided by capillary, fluidic, and gravitational forces. We outline a microfabrication process that yields single-crystal, silicon FETs in a freestanding, powder-like collection for use with self-assembly. Demonstrations of self-assembled FETs on plastic include logic inverters and measured electron mobility of 592 cm2/V-s. Finally, we extend the self-assembly process to substrates each containing 10,000 binding sites and realize 97% self-assembly yield within 25 min for 100-microm-sized elements. High-yield self-assembly of micrometer-scale functional devices as outlined here provides a powerful approach for production of macroelectronic systems. 10.1073/pnas.0602893103


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