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kewms process [9 articles]

最近 kewms さんのライブラリに追加された論文の中から タグ process. You can also see everyone's process.
  • Large area electronics using printing methods
    Proceedings of the IEEE, Vol. 93, No. 7. (2005), pp. 1321-1329.
  • Vacuum web coating - state of the art and potential for electronics
    Proceedings of the IEEE, Vol. 93, No. 8. (2005), pp. 1483-1490.
  • Sensitivity of double-gate and FinFETDevices to process variations
    Electron Devices, IEEE Transactions on, Vol. 50, No. 11. (2003), pp. 2255-2261.
    by Shiying Xiong, J Bokor
    posted to finfet process by kewms on 2006-06-04 22:37:19 as **
  • Optimal automatic control of multistage production processes
    Semiconductor Manufacturing, IEEE Transactions on, Vol. 18, No. 1. (2005), pp. 94-103.
    by J Fenner, M Jeong, Jye-Chyi Lu
    posted to control process by kewms on 2005-04-15 23:20:31 as **
  • Comparing the economic impact of alternative metrology methods in semiconductor manufacturing
    Semiconductor Manufacturing, IEEE Transactions on, Vol. 15, No. 4. (2002), pp. 454-463.
    by P Jula, C Spanos, R Leachman
    posted to control process by kewms on 2005-04-15 23:19:49 as ****
  • Data mining for improving a cleaning process in the semiconductor industry
    Semiconductor Manufacturing, IEEE Transactions on, Vol. 15, No. 1. (2002), pp. 91-101.
    posted to cleaning control process by kewms on 2005-04-15 20:08:56 as **** along with 1 person jrblevin
  • Real-time predictive control of photoresist film thickness uniformity
    Semiconductor Manufacturing, IEEE Transactions on, Vol. 15, No. 1. (2002), pp. 51-59.
    by Lay L Lee, C Schaper, Weng K Ho
    posted to control lithography process by kewms on 2005-04-15 20:06:19 as **
  • Nonlinear modeling and multivariable control of photolithography
    Semiconductor Manufacturing, IEEE Transactions on, Vol. 15, No. 3. (2002), pp. 310-322.
    posted to control lithography process by kewms on 2005-04-15 20:03:47 as **
  • Microeconomics of process control in semiconductor manufacturing
    Proceedings of SPIE, Vol. 5043 (June 2003), 57-71.
    by Kevin M Monahan
    edited by Alfred KK Wong, Kevin M Monahan
    posted to control process by kewms on 2005-04-15 19:59:47 as ****
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