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karlberggren nonplanar [1 article]

最近 karlberggren さんのライブラリに追加された論文の中から タグ nonplanar. You can also see everyone's nonplanar.
  • Multilayer resist methods for nanoimprint lithography on nonflat surfaces
    Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures), Vol. 16, No. 6. (November 1998)
    by Xiaoyun Sun, Lei Zhuang, Wei Zhang, S Chou
    posted to lithography nanoimprint nonplanar by karlberggren on 2005-04-18 19:43:26 as ** along with 1 group quantum
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