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karlberggren Yeung [1 article]

最近 karlberggren さんのライブラリに追加された論文の中から 著者が Yeung. であるものをリストアップしています. You can also see everyone's Yeung.
  • Extending optics to 50 nm and beyond with immersion lithography
    Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures), Vol. 21, No. 6. (2003/11/)
    by M Switkes, RR Kunz, M Rothschild, RF Sinta, M Yeung, SY Baek
    posted to imersion lithography optical by karlberggren on 2005-07-14 16:24:17 as ** along with 1 group quantum
  • 注: このページを引用する時は次のURLでどうぞ: http://www.citeulike.org/user/karlberggren/author/Yeung

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