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karlberggren Rothschild [3 articles]

最近 karlberggren さんのライブラリに追加された論文の中から 著者が Rothschild. であるものをリストアップしています. You can also see everyone's Rothschild.
  • Hybrid optical maskless lithography: Scaling beyond the 45 nm node
    Vol. 23, No. 6. (2005), pp. 2743-2748.
  • Immersion liquids for lithography in the deep ultraviolet
    Proceedings of the SPIE - The International Society for Optical Engineering, Vol. 5040, No. 1. (2003//)
    by M Switkes, RR Kunz, RF Sinta, M Rothschild, Gallagher PM Wetmore, VJ Krukonis, K Williams
    posted to immersion lithography optical by karlberggren on 2005-07-14 16:24:59 as ** along with 1 group quantum
  • Extending optics to 50 nm and beyond with immersion lithography
    Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures), Vol. 21, No. 6. (2003/11/)
    by M Switkes, RR Kunz, M Rothschild, RF Sinta, M Yeung, SY Baek
    posted to imersion lithography optical by karlberggren on 2005-07-14 16:24:17 as ** along with 1 group quantum
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