Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniques

@article{citeulike:2648117, abstract = {Planar microwave and millimeter-wave inductors and capacitors have been fabricated on high-resistivity silicon substrates using micro-machining techniques. The inductors and capacitors are suspended on a thin dielectric membrane to reduce the parasitic capacitance to ground. The resonant frequencies of a 1.2 nH and a 1.7-nH inductor have been increased from 22 GHz and 17 GHz to around 70 GHz and 50 GHz, respectively. We also report on the design and measurement of a new class of stripline filters suspended on a thin dielectric membrane. Interdigitated filters with 43\% and 5\% bandwidth have been fabricated and exhibit a port-to-port 0.7 dB and 2.0 dB loss, respectively, at 14-15 GHz. The micro-machining fabrication technique can be used with silicon and GaAs substrates in microstrip or coplanar-waveguide configurations to result in planar low-loss lumped elements and filters suitable for monolithic integration or surface mount devices up to 100 GHz}, author = {Chi, Chen-Yu and Rebiez, G. M. }, booktitle = {Microwave Theory and Techniques, IEEE Transactions on}, citeulike-article-id = {2648117}, doi = {10.1109/22.375218}, journal = {Microwave Theory and Techniques, IEEE Transactions on}, keywords = {component, filter, lumped, microwave, planar, tesis}, number = {4}, pages = {730--738}, posted-at = {2008-04-10 07:27:10}, priority = {2}, title = {Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniques}, url = {http://dx.doi.org/10.1109/22.375218}, volume = {43}, year = {1995} }

TY - JOUR ID - citeulike:2648117 L3 - citeulike-article-id:2648117 TI - Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniques T2 - Microwave Theory and Techniques, IEEE Transactions on JF - Microwave Theory and Techniques, IEEE Transactions on VL - 43 IS - 4 SP - 730 EP - 738 N2 - Planar microwave and millimeter-wave inductors and capacitors have been fabricated on high-resistivity silicon substrates using micro-machining techniques. The inductors and capacitors are suspended on a thin dielectric membrane to reduce the parasitic capacitance to ground. The resonant frequencies of a 1.2 nH and a 1.7-nH inductor have been increased from 22 GHz and 17 GHz to around 70 GHz and 50 GHz, respectively. We also report on the design and measurement of a new class of stripline filters suspended on a thin dielectric membrane. Interdigitated filters with 43% and 5% bandwidth have been fabricated and exhibit a port-to-port 0.7 dB and 2.0 dB loss, respectively, at 14-15 GHz. The micro-machining fabrication technique can be used with silicon and GaAs substrates in microstrip or coplanar-waveguide configurations to result in planar low-loss lumped elements and filters suitable for monolithic integration or surface mount devices up to 100 GHz KW - component KW - filter KW - lumped KW - microwave KW - planar KW - tesis AU - Chi, Chen-Yu AU - Rebiez, GM PY - 1995/// UR - http://dx.doi.org/10.1109/22.375218 ER -