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タグ: wsix [2 articles]

Recent papers classified by the tag wsix.
  • notes Reactive-ion etching of tungsten silicide using NF[sub 3] gas mixtures
    Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, No. 6. (1991), pp. 2747-2751.
    by Ru L Lee, Jr
    posted to chf3 nf3-h2 nf3-he plasmas rie wsix by these_morel on 2006-02-28 14:57:39 as read along with 1 group LTM_LETI_etching
  • notes Study of the impact of the time-delay effect on the critical dimension of a tungsten silicide/polysilicon gate after reactive ion etching
    The 46th international symposium of the american vacuum society, Vol. 18, No. 4. (2000), pp. 1173-1175.
    by Shih P Lin, Chen H Ou, Szetsen Lee, Yu C Tien, Chin F Hsu
    posted to hbr-cl2-o2 poly-si rie time-delay-effect wsix by these_morel on 2006-02-28 15:09:27 as read along with 1 group LTM_LETI_etching
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