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タグ: deposition [49 articles]

Recent papers classified by the tag deposition.
  • Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
    Angewandte Chemie International Edition, Vol. 42, No. 45. (2003), pp. 5548-5554.
    by Markku Leskelä, Mikko Ritala
    posted to ald atomic deposition layer review by thomaswaechtler on 2007-02-12 15:04:02 as read
  • notes Composition, residual stress, and structural properties of thin tungsten nitride films deposited by reactive magnetron sputtering
    Journal of Applied Physics, Vol. 88, No. 3. (2000), pp. 1380-1388.
    by YG Shen, YW Mai, DR Mckenzie, QC Zhang, WD Mcfall, WE Mcbride
    posted to deposition tungsten-nitride by these_morel on 2006-12-14 13:45:52 as read along with 1 group LTM_LETI_etching
  • Deposition of large particles from warehouse fire plumes--a small-scale wind tunnel model study
    Journal of Hazardous Materials, Vol. 59, No. 1. (March 1998), pp. 13-29.
    by DJ Hall, V Kukadia, S Walker, GW Marsland
    posted to deposition dispersion fire fires large particle plume warehouse by Sputnik1 on 2008-01-24 08:51:49 as **
  • Surface sample collection and dust source analysis in northwestern China
    CATENA, Vol. 59, No. 1. (1 January 2005), pp. 35-53.
    by Xunming Wang, Zhibao Dong, Ping Yan, Zuotao Yang, Zhixin Hu
    posted to china deposition dust northwestern samples sources surface by ricckli on 2008-04-13 12:22:55 as ** along with 1 person guitarwolf
  • Prediction of surface flow hydrology and sediment retention upslope of a vetiver buffer strip
    Journal of Hydrology, Vol. 338, No. 3-4. (30 May 2007), pp. 261-272.
    by Janet Hussein, Bofu Yu, Hossein Ghadiri, Calvin Rose
    posted to buffer-strips deposition hydrology by peterheng on 2008-03-28 19:00:12 as **
  • Sediment deposition from flow at low gradients into a buffer strip--a critical test of re-entrainment theory
    Journal of Hydrology, Vol. 280, No. 1-4. (September 2003), pp. 33-51.
    by Calvin W Rose, Bofu Yu, William L Hogarth, Augustine E Okom, Hossein Ghadiri
    posted to buffer-strips deposition reentrainment by peterheng on 2008-03-28 18:22:44 as read
  • Surface-Mediated Control of Blood Coagulation: The Role of Binding Site Densities and Platelet Deposition
    Biophys. J., Vol. 80, No. 3. (1 March 2001), pp. 1050-1074.
    by Andrew L Kuharsky, Aaron L Fogelson
    posted to coagulation deposition platelet by matthewhflamm on 2008-03-27 18:01:08 as read
  • Computational Simulation of Platelet Deposition and Activation: II. Results for Poiseuille Flow over Collagen
    Annals of Biomedical Engineering, Vol. 27, No. 4. (1 July 1999), pp. 449-458.
    by Erik N Sorensen, Greg W Burgreen, William R Wagner, James F Antaki
    posted to computational_simulation deposition platelet by matthewhflamm on 2008-04-17 19:17:22 as **
  • Computational Simulation of Platelet Deposition and Activation: I. Model Development and Properties
    Annals of Biomedical Engineering, Vol. 27, No. 4. (1 July 1999), pp. 436-448.
    by Erik N Sorensen, Greg W Burgreen, William R Wagner, James F Antaki
    posted to computational_simulation deposition platelet by matthewhflamm on 2008-04-17 19:16:28 as **
  • Boundary-layer Type Solutions for Initial Platelet Activation and Deposition
    Journal of Theoretical Medicine (January 2002), pp. 95-108.
    by T David, PG de Groot, PG Walker
    posted to activation deposition platelet by matthewhflamm on 2008-04-17 19:14:42 as **
  • Theoretical and experimental study of vapor deposition onto a dressed body part
    AIChE Journal, Vol. 9999, No. 9999. (2008), NA.
    by Paul Brasser, Tiny van Houwelingen
    posted to cloth deposition vapor by majdula on 2008-02-01 11:41:37 as **
  • Optical waveguide fabrication by combination of spin-on-glass and plasma-enhanced chemical vapor deposition for optoelectronic integration
    Optical Engineering, Vol. 42, No. 4. (2003), pp. 898-899.
    by Tomiyuki Arakawa, Tatsushi Hasegawa, Masatoshi Kagawa
    posted to deposition experiment hardcopy polysilazane processing refractive_index silicon_oxide spin_on_glass by kristgy on 2006-11-20 10:32:51 as ** along with 1 person hanss
  • Suppression of Water Absorption in Borophosphosilicate Glass Thin Layers with High Boron Concentration
    Journal of The Electrochemical Society, Vol. 138, No. 8. (1991), pp. 2367-2370.
    by K Nauka, Charles Liu
    posted to absorption bpsg deposition experiment hardcopy lpcvd processing silane water by kristgy on 2006-10-24 13:57:08 as read
  • Kinetics and Uniformity of Deposition of Borophosphosilicate Glass from Silane and Oxygen in a Single-Wafer Reactor
    Journal of The Electrochemical Society, Vol. 139, No. 9. (1992), pp. 2573-2579.
    by Daniel M Dobkin
    posted to bpsg deposition experiment hardcopy lpcvd processing silane silicon_oxide by kristgy on 2006-10-24 13:53:27 as *
  • Growth of borosilicate and borophosphosilicate films at low pressure and temperature
    Thin Solid Films, Vol. 130, No. 1-2. (16 August 1985), pp. 103-111.
    by Arthur J Learn, Bill Baerg
    posted to bpsg bsg deposition diborane lpcvd phosphine processing psg silicon_oxide teos by kristgy on 2006-11-10 15:20:41 as ***
  • Conformal deposition of LPCVD TEOS
    Micromachining and Microfabrication Process Technology VII, Vol. 4557, No. 1. (2001), pp. 329-340.
    by Paul Mccann, Kumar Somasundram, Stephen Byrne, Andrew Nevin
    edited by Jean M Karam, John A Yasaitis
    posted to teos experiment deposition by kristgy on 2007-01-12 11:43:36 as **
  • The step coverage of undoped and phosphorus-doped SiO[sub 2] glass films
    Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 1, No. 1. (1983), pp. 54-61.
    by RM Levin, Evans K Lutterodt
    posted to 50_citations deposition experiment hardcopy lpcvd processing psg reflow silicon_oxide teos by kristgy on 2006-11-08 16:13:21 as read
  • Effects of borophosilicate film post-growth treatments on the flow angle
    Thin Solid Films, Vol. 185, No. 2. (March 1990), pp. 363-371.
    by YH Tsai, SL Hsu, FC Tseng, CS Yoo
    posted to bpsg deposition experiment hardcopy lpcvd processing reflow silane silicon_oxide by kristgy on 2006-10-24 13:47:33 as read
  • Low-pressure deposition of high-quality SiO[sub 2] films by pyrolysis of tetraethylorthosilicate
    Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 5, No. 6. (1987), pp. 1555-1563.
    by FS Becker, D Pawlik, H Anzinger, A Spitzer
    posted to deposition experiment lpcvd processing silicon_oxide teos by kristgy on 2006-11-10 14:53:24 as **
  • Photonic circuits integrated with CMOS compatible photodetectors
    Optical Materials, Vol. 17, No. 1-2. ( 2001), pp. 201-205.
    by Dana Cristea, F Craciunoiu, M Modreanu, M Caldararu, I Cernica
    posted to deposition photodiode processing sabio spin_on_glass waveguide silicon_oxynitride by kristgy on 2006-11-13 15:13:54 as **
  • Refractive index behaviour of phosphorus-doped planar silica waveguides
    Journal of Physics D: Applied Physics, Vol. 25, No. 5. (1992), pp. 733-739.
    by P Heimala, J Aarnio
    posted to deposition experiment lpcvd processing psg reflow refractive_index sabio silicon_oxide waveguide by kristgy on 2006-11-08 15:43:57 as **
  • Catalytic effect of phosphine on the deposition of phosphosilicate glass from tetraethoxysilane
    Applied Physics Letters, Vol. 62, No. 7. (1993), pp. 699-701.
    by Laura L Tedder, John E Crowell, Kevin J Uram, John K Shugrue, D Tribula
    posted to deposition experiment hardcopy lpcvd processing psg silicon_oxide teos by kristgy on 2006-11-06 10:15:51 as read
  • Properties of borophosphosilicate glass films deposited by different chemical vapor deposition techniques
    Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 10, No. 2. (1992), pp. 633-642.
    by S Rojas, R Gomarasca, L Zanotti, A Borghesi, A Sassella, G Ottaviani, L Moro, P Lazzeri
    posted to bpsg deposition experiment hardcopy lpcvd pecvd processing reflow silicon_oxide by kristgy on 2006-10-24 13:21:44 as read
  • Gap Fill and Film Reflow Capability of Subatmospheric Chemical Vapor Deposited Borophosphosilicate Glass
    Journal of The Electrochemical Society, Vol. 143, No. 4. (1996), pp. 1414-1421.
    by Stuardo Robles, Kathleen Russell, Maria Galiano, V Siva, Victoria Kithcart, Bang C Nguyen
    posted to bpsg deposition experiment hardcopy lpcvd processing reflow silicon_oxide teos by kristgy on 2006-11-06 09:42:24 as **
  • ULSI Gap Filling with a Thin CVD SiO2-Based Insulator: A Review
    Russian Microelectronics, Vol. V31, No. 4. (1 July 2002), pp. 224-231.
    by VY Vassiliev
    posted to bpsg deposition hardcopy processing reflow review silicon_oxide by kristgy on 2006-11-06 09:16:44 as **
  • The High Temperature Deposition and Evaluation of Phosphorus- or Boron-Doped Silicon Dioxide Films
    Journal of The Electrochemical Society, Vol. 126, No. 2. (1979), pp. 313-319.
    by AC Adams, CD Capio, SE Haszko, GI Parisi, EI Povilonis, Mcd
    posted to bsg deposition diborane experiment lpcvd phosphine processing psg silane silicon_oxide by kristgy on 2006-11-10 10:04:24 as **
  • CVD of SiO<SUB><FONT SIZE='-1'>2</FONT></SUB> and related materials: An overview
    Advanced Materials for Optics and Electronics, Vol. 6, No. 2. (1996), pp. 101-114.
    by Andrew R Barron
    posted to bpsg bsg deposition hardcopy processing psg reflow review silicon_oxide by kristgy on 2006-10-24 13:04:48 as read
  • The Deposition of Silicon Dioxide Films at Reduced Pressure
    Journal of The Electrochemical Society, Vol. 126, No. 6. (1979), pp. 1042-1046.
    by AC Adams, CD Capio
    posted to 100_citations deposition experiment lpcvd processing psg silicon_oxide teos by kristgy on 2006-11-10 09:58:40 as **
  • Silicon Dioxide Deposition by Atmospheric Pressure and Low-Temperature CVD Using TEOS and Ozone
    Journal of The Electrochemical Society, Vol. 137, No. 9. (1990), pp. 2883-2887.
    by K Fujino, Y Nishimoto, N Tokumasu, K Maeda
    posted to 50_citations deposition first_paper ozone processing silicon_oxide teos by kristgy on 2006-11-06 12:42:58 as **
  • Optical properties of LPCVD silicon oxynitride
    Thin Solid Films, Vol. 337, No. 1-2. (11 January 1999), pp. 82-84.
    by M Modreanu, N Tomozeiu, P Cosmin, Mariuca Gartner
    posted to deposition ellipsometry experiment lpcvd processing refractive_index silicon_nitride silicon_oxynitride by kristgy on 2007-02-22 14:54:23 as **
  • Fluorescent Plasma Nanocomposite Thin Films Containing Nonaggregated Rhodamine 6G Laser Dye Molecules
    Langmuir, Vol. 22, No. 16. (1 August 2006), pp. 6719-6722.
    by A Barranco, P Groening
    posted to deposition dye first_paper hardcopy pecvd phodye phodye_group_papers polymeric processing by kristgy on 2006-11-22 15:21:11 as **
  • Dielectric film deposition by atmospheric pressure and low temperature CVD using TEOS, ozone, and new organometallic doping sources
    VLSI Multilevel Interconnection Conference, 1989. Proceedings., Sixth International IEEE (1989), pp. 382-389.
    by Y Nishimoto, N Tokumasu, K Fujino, K Maeda
    posted to bpsg deposition processing psg reflow silicon_oxide teos by kristgy on 2006-11-06 12:22:31 as **
  • Process and film characterization of low pressure tetraethylorthosilicate--borophosphosilicate glass
    Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 4, No. 3. (1986), pp. 732-744.
    by FS Becker, D Pawlik, H Schafer, G Staudigl
    posted to bpsg deposition experiment hardcopy lpcvd reflow silicon_oxide teos by kristgy on 2006-11-05 22:17:59 as read
  • Planarization Processes and Applications: I. Undoped GeO[sub 2]-SiO[sub 2] Glasses
    Journal of The Electrochemical Society, Vol. 146, No. 10. (1999), pp. 3860-3871.
    by Darrell L Simpson, Robert T Croswell, Arnold Reisman, Dorota Temple, Kenneth C Williams
    posted to deposition germanosilicate processing reflow silane silicon_oxide by kristgy on 2006-10-24 12:38:07 as **
  • Low Pressure Deposition of Phosphosilicate Glass Films
    Journal of The Electrochemical Society, Vol. 129, No. 7. (1982), pp. 1588-1592.
    by RM Levin, AC Adams
    posted to 25_citations deposition experiment hardcopy lpcvd processing psg refractive_index silicon_oxide teos by kristgy on 2006-11-06 12:09:58 as read
  • Growth and characterization of silicon nitride films for optoelectronics applications
    Optical Materials, Vol. 27, No. 2. (November 2004), pp. 139-146.
    by RK Pandey, LS Patil, Jaspal P Bange, DK Gautam
    posted to absorption deposition experiment lpcvd processing refractive_index silicon_nitride stress by kristgy on 2007-02-22 14:48:16 as **
  • Low Pressure Deposition of Doped SiO[sub 2] by Pyrolysis of Tetraethylorthosilicate (TEOS)
    Journal of The Electrochemical Society, Vol. 134, No. 11. (1987), pp. 2923-2931.
    by FS Becker, S Rohl
    posted to bpsg deposition experiment hardcopy lpcvd processing reflow silicon_oxide teos by kristgy on 2006-11-05 22:05:54 as read
  • The flow characteristics of borophosphosilicate (TEOS based) glass
    VLSI Multilevel Interconnection Conference, 1991, Proceedings., Eighth International IEEE (1991), pp. 68-74.
    by S Chittipeddi, AN Velaga, AK Nanda, WT Cochran, RN Graver
    posted to bpsg deposition diborane lpcvd processing silicon_oxide teos by kristgy on 2006-11-10 16:00:22 as **
  • Adiabatic 3-dB couplers, filters, and multiplexers made with silica waveguides on silicon
    Lightwave Technology, Journal of, Vol. 10, No. 1. (1992), pp. 46-50.
    by R Adar, CH Henry, RF Kazarinov, RC Kistler, GR Weber
    posted to bpsg deposition experiment lpcvd mach-zehnder processing psg reflow silicon_oxide waveguide by kristgy on 2006-11-21 15:00:20 as **
  • Planarization Processes and Applications: II. B[sub 2]O[sub 3]/P[sub 2]O[sub 5] Doped GeO[sub 2]-SiO[sub 2] Glasses
    Journal of The Electrochemical Society, Vol. 146, No. 10. (1999), pp. 3872-3885.
    by Darrell L Simpson, Robert T Croswell, Arnold Reisman, Dorota Temple, Kenneth C Williams
    posted to bpsg deposition germanosilicate processing reflow silane silicon_oxide by kristgy on 2006-10-24 14:03:27 as **
  • Plasma-Activated Deposition and Properties of Phosphosilicate Glass Film
    Journal of The Electrochemical Society, Vol. 131, No. 8. (1984), pp. 1865-1870.
    by Akira Takamatsu, Miyoko Shibata, Hideo Sakai, Takeo Yoshimi
    posted to deposition experiment hardcopy processing psg reflow silane silicon_oxide by kristgy on 2006-10-24 11:44:25 as read
  • Water Absorption and Densification of Phosphosilicate Glass Films
    Journal of The Electrochemical Society, Vol. 129, No. 8. (1982), pp. 1765-1770.
    by RM Levin
    posted to 25_citations absorption biosensor deposition experiment hardcopy lpcvd processing psg reflow silicon_oxide teos water waveguide by kristgy on 2006-11-08 15:29:52 as read
  • Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation
    Applied Physics Letters, Vol. 57, No. 2. (1990), pp. 108-110.
    by N Moriya, Shacham Y Diamand, R Kalish
    posted to deposition experiment processing refractive_index silicon_oxide spin_on_glass by kristgy on 2006-11-20 11:49:24 as ** along with 1 person hanss
  • Copper deposition on micropatterned electrodes from an industrial acid copper plating bath
    Journal of Applied Electrochemistry, Vol. 30, No. 1. (1 January 2000), pp. 1-12.
    by S Goldbach, B Van den Bossche, T Daenen, J Deconinck, F Lapicque
    posted to deposition plating by flora_tomasoni on 2007-06-26 12:54:01 as **
  • Copper deposition on micropatterned electrodes from an industrial acid copper plating bath
    pp. 1-12.
    by S Goldbach
    posted to deposition plating by flora_tomasoni on 2007-06-26 12:50:27 as **
  • notes The path to ubiquitous and low-cost organic electronic appliances on plastic
    Nature, Vol. 428, No. 6986. (29 April 2004), pp. 911-918.
    by SR Forrest
    posted to cold deposition ink-jet spin-on thermal transfer vacuum welding by enricaki on 2007-12-14 22:39:46 as ** along with 4 people and 1 group wmppaul kewms Macroelectronics zhaoxuanhe Macroelectronics
  • Dynamic Shadow Mask Technique: A Universal Tool for Nanoscience
    Nano Lett., Vol. 5, No. 1. (12 January 2005), pp. 15-20.
    by S Egger, A Ilie, Y Fu, J Chongsathien, DJ Kang, ME Welland
    posted to deposition nanostructures nanostructuring by anyscientist on 2007-02-14 10:00:04 as **
  • Vacuum arc deposition devices
    Review of Scientific Instruments, Vol. 77, No. 2. (2006)
    by RL Boxman, VN Zhitomirsky
    posted to arc deposition marko plasma by alexgm on 2006-03-15 10:05:45 as ***
  • Nitrogen Excess in North American Ecosystems: Predisposing Factors, Ecosystem Responses, and Management Strategies
    Ecological Applications, Vol. 8, No. 3. (1998), pp. 706-733.
    by Mark E Fenn, Mark A Poth, John D Aber, Jill S Baron, Bernard T Bormann, Dale W Johnson, Dennis A Lemly, Steven G Mcnulty, Douglas F Ryan, Robert Stottlemyer
    posted to 2006-35 deposition forest nitrogen by agallet on 2006-09-15 14:49:21 as **
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