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6781 afm atomic-physics bcp bibtex-import chemistry cleaning computing devices devices--magnetic devices--organic-transistors devices--spin direct electron-optics euv evolutionary-algorithms fabrication fluorescenceoptical focusingoptical havepdf high-index interferometric josephson junctions lines liquid-like lithography lithography--3d lithography--alignment lithography--atomic lithography--direct-write lithography--ebeam lithography--feedback lithography--fib lithography--imersion lithography--immersion lithography--liftoff lithography--nanogap lithography--nanoimprint lithography--neutral-atom lithography--nodal lithography--nonplanar lithography--optical lithography--photoresist lithography--photoresists lithography--plasmonic lithography--quantum lithography--scanning-probe lithography--sfil lithography--soft lithography--superresolution lithography--two-photon materials metamaterials metrology microscopesoptical microscopy nanodots nanoimprint nanooptics nbaloxnb nbn near-field negative-index niobium nitride optical optics phase-slip photodetectors photodetectors-sspd plasmonics plate power quantum quantum-computing quantum-computing--cavity-qed quantum-computing--control quantum-computing--nmr quantum-computing--superconductive quantum-cryptography--detectors quantum-dot quantum-dots quantum-optics quantum-optics--eit qubit resists--dnq resolving review self-assembly sem sfil step-and-flash subresolution superconductivity superconductivity--theory superconductors superresolution templated testing trapping trilayers vlsi write zone zpal

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