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Group: quantum - with tag subresolution [3 articles]

グループ quantum のメンバーが最近追加した論文の一覧 with tag subresolution
  • Hybrid optical maskless lithography: Scaling beyond the 45 nm node
    Vol. 23, No. 6. (2005), pp. 2743-2748.
    by M Fritze, TM Bloomstein, B Tyrrell, TH Fedynyshyn, Jr, DE Hardy, S Cann, D Lennon, S Spector, M Rothschild, P Brooker
    posted to subresolution optical lithography 6781 by karlberggren to the group quantum on 2007-04-02 16:47:17 as read
  • Gratings of regular arrays and trim exposures for ultralarge scale integrated circuit phase-shift lithography
    The 45th international conference on electron, ion, and photon beam technology and nanofabrication, Vol. 19, No. 6. (2001), pp. 2366-2370.
    by M Fritze, B Tyrrell, D Astolfi, D Yost, P Davis, B Wheeler, R Mallen, J Jarmolowicz, S Cann, D Chan, P Rhyins, C Carney, J Ferri, BA Blachowicz
    posted to subresolution optical lithography 6781 by karlberggren to the group quantum on 2007-04-02 16:45:49 as read
  • Sharper Focus for a Radially Polarized Light Beam
    Physical Review Letters, Vol. 91, No. 23. (2 December 2003), 233901.
    by R Dorn, S Quabis, G Leuchs
    posted to subresolution optics by karlberggren to the group quantum on 2007-03-28 21:10:14 as read
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