Inductively coupled Cl2/O2 plasma: experimental investigation and modelling

by: Efremov, Dong-Pyo Kim, Chang-Il Kim

Vacuum, Vol. 75, No. 11-12. (2004), pp. 237-246.

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Abstract

In this work, we investigated the influence of the Cl2/O2 mixing ratio on both the plasma parameters and the volume densities of the neutral and the charged particles in inductively coupled plasma system. The change in the gas mixture composition from pure Cl2 to O2 was found to lead to an increase in the electron density and in the electron temperature. Accordingly, the addition of oxygen to chlorine influences electron-impact dissociation kinetics as well as it can cause a stepwise dissociation of Cl2 molecules through their interaction with oxygen atoms. As a result, in Cl2-rich plasma, a non-monotonic behaviour of the Cl atom density is possible.

@article{98, abstract = {In this work, we investigated the influence of the Cl2/O2 mixing ratio on both the plasma parameters and the volume densities of the neutral and the charged particles in inductively coupled plasma system. The change in the gas mixture composition from pure Cl2 to O2 was found to lead to an increase in the electron density and in the electron temperature. Accordingly, the addition of oxygen to chlorine influences electron-impact dissociation kinetics as well as it can cause a stepwise dissociation of Cl2 molecules through their interaction with oxygen atoms. As a result, in Cl2-rich plasma, a non-monotonic behaviour of the Cl atom density is possible.}, author = {Efremov and Kim, Dong-Pyo and Kim, Chang-Il }, citeulike-article-id = {2307281}, doi = {http://dx.doi.org/10.1016/S0042-207X(80)80006-6}, journal = {Vacuum}, keywords = {cl2-o2, icp, optical-emission-spectroscopy}, number = {11-12}, pages = {237--246}, posted-at = {2008-01-30 13:06:03}, priority = {0}, title = {Inductively coupled Cl2/O2 plasma: experimental investigation and modelling}, url = {http://dx.doi.org/10.1016/S0042-207X(80)80006-6}, volume = {75}, year = {2004} }

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TY - JOUR ID - 98 L3 - citeulike-article-id:2307281 TI - Inductively coupled Cl2/O2 plasma: experimental investigation and modelling JF - Vacuum VL - 75 IS - 11-12 SP - 237 EP - 246 N2 - In this work, we investigated the influence of the Cl2/O2 mixing ratio on both the plasma parameters and the volume densities of the neutral and the charged particles in inductively coupled plasma system. The change in the gas mixture composition from pure Cl2 to O2 was found to lead to an increase in the electron density and in the electron temperature. Accordingly, the addition of oxygen to chlorine influences electron-impact dissociation kinetics as well as it can cause a stepwise dissociation of Cl2 molecules through their interaction with oxygen atoms. As a result, in Cl2-rich plasma, a non-monotonic behaviour of the Cl atom density is possible. KW - cl2-o2 KW - icp KW - optical-emission-spectroscopy AU - Efremov AU - Kim, Dong-Pyo AU - Kim, Chang-Il PY - 2004/// UR - http://dx.doi.org/10.1016/S0042-207X(80)80006-6 ER -

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