MOLECULAR APPROACH TO MATERIAL DETACHMENT MECHANISM DURING CHEMICAL MECHANICAL PLANARIZATION

@article{citeulike:2937605, author = {Zhang and Ruqin and Wang and Xiaoping and Shrotriya and Pranav and Biswas and Rana and Bastawros and Ashraf and Chandra and Abhijit}, citeulike-article-id = {2937605}, doi = {http://dx.doi.org/10.1080/10910340701700799}, issn = {1091-0344}, journal = {Machining Science and Technology}, month = {October}, number = {4}, pages = {515--530}, posted-at = {}, publisher = {Taylor and Francis Ltd}, title = {MOLECULAR APPROACH TO MATERIAL DETACHMENT MECHANISM DURING CHEMICAL MECHANICAL PLANARIZATION}, url = {http://dx.doi.org/10.1080/10910340701700799}, volume = {11}, year = {2007} }

TY - JOUR ID - citeulike:2937605 L3 - citeulike-article-id:2937605 TI - MOLECULAR APPROACH TO MATERIAL DETACHMENT MECHANISM DURING CHEMICAL MECHANICAL PLANARIZATION JF - Machining Science and Technology VL - 11 IS - 4 SP - 515 EP - 530 PB - Taylor and Francis Ltd SN - 1091-0344 AU - Zhang AU - Ruqin AU - Wang AU - Xiaoping AU - Shrotriya AU - Pranav AU - Biswas AU - Rana AU - Bastawros AU - Ashraf AU - Chandra AU - Abhijit PY - 2007/10// UR - http://dx.doi.org/10.1080/10910340701700799 ER -